2/3/2011	11:00:31 AM	SiCl4 pre valve closed
2/3/2011	11:00:31 AM	SiCl4 post valve closed
2/3/2011	11:00:32 AM	Helium valve closed
2/3/2011	11:00:37 AM	Bypass valve closed
2/3/2011	11:00:37 AM	Main Vac valve closed
2/3/2011	11:00:51 AM	Helium valve opened
2/3/2011	11:00:52 AM	Helium valve closed
2/3/2011	11:01:01 AM	Helium valve opened
2/3/2011	11:01:42 AM	Helium valve closed
2/3/2011	11:01:55 AM	Helium valve opened
2/3/2011	11:02:38 AM	Bypass valve opened
2/3/2011	11:02:38 AM	Bypass valve closed
2/3/2011	11:03:05 AM	SiCl4 post valve opened
2/3/2011	11:03:09 AM	SiCl4 pre valve opened
2/3/2011	11:03:44 AM	SiCl4 pre valve closed
2/3/2011	11:03:44 AM	SiCl4 post valve closed
2/3/2011	11:03:46 AM	Helium valve closed
2/3/2011	11:05:18 AM	SiCl4 post valve opened
2/3/2011	11:05:18 AM	SiCl4 post valve closed
2/3/2011	11:07:04 AM	SiCl4 post valve opened
2/3/2011	11:07:04 AM	SiCl4 post valve closed
2/3/2011	11:07:07 AM	SiCl4 post valve opened
2/3/2011	11:07:08 AM	SiCl4 post valve closed
2/3/2011	11:07:14 AM	Bypass valve opened
2/3/2011	11:07:14 AM	Bypass valve closed
2/3/2011	11:07:19 AM	Bypass valve opened
2/3/2011	11:07:57 AM	Main Vac valve opened
2/3/2011	3:30:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/3/2011	3:30:01 PM	Recipe started at 3:30 PM
2/3/2011	3:30:01 PM	H2 valve closed
2/3/2011	3:30:01 PM	BCl3 valve closed
2/3/2011	3:30:01 PM	PH3 valve closed
2/3/2011	3:30:01 PM	SiCl4 pre valve closed
2/3/2011	3:30:01 PM	SiCl4 post valve closed
2/3/2011	3:30:01 PM	Main Vac valve closed
2/3/2011	3:30:01 PM	Bypass valve closed
2/3/2011	3:30:01 PM	Bubbler valve closed
2/3/2011	3:30:01 PM	Helium valve opened
2/3/2011	3:30:01 PM	Helium MFC set to  500.000000
2/3/2011	3:30:01 PM	H2 MFC set to  0.000000
2/3/2011	3:30:01 PM	BCl3 MFC set to  0.000000
2/3/2011	3:30:01 PM	PHl3 MFC set to  0.000000
2/3/2011	3:30:01 PM	SiCl4 MFC set to  0.000000
2/3/2011	3:30:01 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	3:30:01 PM	Tube furnace set to 0
2/3/2011	3:31:19 PM	Helium valve closed
2/3/2011	3:31:19 PM	H2 valve closed
2/3/2011	3:31:19 PM	BCl3 valve closed
2/3/2011	3:31:19 PM	PH3 valve closed
2/3/2011	3:31:19 PM	SiCl4 pre valve closed
2/3/2011	3:31:19 PM	SiCl4 post valve closed
2/3/2011	3:31:19 PM	Main Vac valve closed
2/3/2011	3:31:19 PM	Bypass valve closed
2/3/2011	3:31:19 PM	Bubbler valve closed
2/3/2011	3:31:19 PM	Helium MFC set to  0.000000
2/3/2011	3:31:19 PM	H2 MFC set to  0.000000
2/3/2011	3:31:19 PM	BCl3 MFC set to  0.000000
2/3/2011	3:31:19 PM	PHl3 MFC set to  0.000000
2/3/2011	3:31:19 PM	SiCl4 MFC set to  0.000000
2/3/2011	3:31:19 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	3:31:20 PM	Tube furnace set to 0
2/3/2011	3:31:20 PM	Run finished at 3:31 PM
2/3/2011	3:31:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/3/2011	3:36:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/3/2011	3:36:31 PM	Recipe started at 3:36 PM
2/3/2011	3:36:31 PM	Helium valve closed
2/3/2011	3:36:31 PM	H2 valve closed
2/3/2011	3:36:31 PM	BCl3 valve closed
2/3/2011	3:36:31 PM	PH3 valve closed
2/3/2011	3:36:31 PM	SiCl4 pre valve closed
2/3/2011	3:36:31 PM	SiCl4 post valve closed
2/3/2011	3:36:31 PM	Main Vac valve closed
2/3/2011	3:36:31 PM	Bubbler valve closed
2/3/2011	3:36:31 PM	Bypass valve opened
2/3/2011	3:36:31 PM	Helium MFC set to  0.000000
2/3/2011	3:36:31 PM	H2 MFC set to  0.000000
2/3/2011	3:36:31 PM	BCl3 MFC set to  0.000000
2/3/2011	3:36:31 PM	PHl3 MFC set to  0.000000
2/3/2011	3:36:31 PM	SiCl4 MFC set to  0.000000
2/3/2011	3:36:31 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	3:36:32 PM	Tube furnace set to 0
2/3/2011	3:37:04 PM	Run aborted at 3:37 PM
2/3/2011	3:37:04 PM	Helium valve closed
2/3/2011	3:37:04 PM	H2 valve closed
2/3/2011	3:37:04 PM	BCl3 valve closed
2/3/2011	3:37:04 PM	PH3 valve closed
2/3/2011	3:37:04 PM	SiCl4 pre valve closed
2/3/2011	3:37:04 PM	SiCl4 post valve closed
2/3/2011	3:37:04 PM	Bypass valve closed
2/3/2011	3:37:04 PM	Main Vac valve closed
2/3/2011	3:37:04 PM	Bubbler valve closed
2/3/2011	3:37:04 PM	Helium MFC set to  0.000000
2/3/2011	3:37:04 PM	H2 MFC set to  0.000000
2/3/2011	3:37:04 PM	BCl3 MFC set to  0.000000
2/3/2011	3:37:04 PM	PHl3 MFC set to  0.000000
2/3/2011	3:37:04 PM	SiCl4 MFC set to  0.000000
2/3/2011	3:37:05 PM	Tube furnace set to 0
2/3/2011	3:37:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/3/2011	3:37:13 PM	Bypass valve opened
2/3/2011	3:37:13 PM	Bypass valve closed
2/3/2011	3:37:27 PM	Bypass valve opened
2/3/2011	3:37:28 PM	Bypass valve closed
2/3/2011	3:37:29 PM	Bypass valve opened
2/3/2011	3:37:30 PM	Bypass valve closed
2/3/2011	3:45:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/3/2011	3:45:31 PM	Recipe started at 3:45 PM
2/3/2011	3:45:31 PM	Helium valve closed
2/3/2011	3:45:31 PM	H2 valve closed
2/3/2011	3:45:31 PM	BCl3 valve closed
2/3/2011	3:45:31 PM	PH3 valve closed
2/3/2011	3:45:31 PM	SiCl4 pre valve closed
2/3/2011	3:45:31 PM	SiCl4 post valve closed
2/3/2011	3:45:31 PM	Main Vac valve closed
2/3/2011	3:45:31 PM	Bubbler valve closed
2/3/2011	3:45:31 PM	Bypass valve opened
2/3/2011	3:45:31 PM	Helium MFC set to  0.000000
2/3/2011	3:45:31 PM	H2 MFC set to  0.000000
2/3/2011	3:45:31 PM	BCl3 MFC set to  0.000000
2/3/2011	3:45:31 PM	PHl3 MFC set to  0.000000
2/3/2011	3:45:31 PM	SiCl4 MFC set to  0.000000
2/3/2011	3:45:31 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	3:45:32 PM	Tube furnace set to 0
2/3/2011	3:46:17 PM	Helium valve closed
2/3/2011	3:46:17 PM	H2 valve closed
2/3/2011	3:46:17 PM	BCl3 valve closed
2/3/2011	3:46:17 PM	PH3 valve closed
2/3/2011	3:46:17 PM	SiCl4 pre valve closed
2/3/2011	3:46:17 PM	SiCl4 post valve closed
2/3/2011	3:46:17 PM	Bubbler valve closed
2/3/2011	3:46:17 PM	Main Vac valve opened
2/3/2011	3:46:17 PM	Bypass valve opened
2/3/2011	3:46:17 PM	Helium MFC set to  0.000000
2/3/2011	3:46:17 PM	H2 MFC set to  0.000000
2/3/2011	3:46:17 PM	BCl3 MFC set to  0.000000
2/3/2011	3:46:17 PM	PHl3 MFC set to  0.000000
2/3/2011	3:46:17 PM	SiCl4 MFC set to  0.000000
2/3/2011	3:46:17 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	3:46:17 PM	Tube furnace set to 0
2/3/2011	3:46:17 PM	Run finished at 3:46 PM
2/3/2011	3:46:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/3/2011	5:19:05 PM	Bypass valve closed
2/3/2011	5:19:05 PM	Main Vac valve closed
2/3/2011	5:19:11 PM	Helium MFC set to  500.000000
2/3/2011	5:19:16 PM	Helium MFC set to  0.000000
2/3/2011	5:19:20 PM	H2 MFC set to  500.000000
2/3/2011	5:19:27 PM	Tube furnace set to 1000
2/3/2011	5:19:28 PM	H2 valve opened
2/3/2011	5:20:43 PM	Bubbler valve opened
2/3/2011	5:20:47 PM	H2 valve closed
2/3/2011	5:20:49 PM	Bubbler valve closed
2/3/2011	5:20:51 PM	Bubbler valve opened
2/3/2011	5:20:52 PM	Bubbler valve closed
2/3/2011	5:20:52 PM	Bubbler valve opened
2/3/2011	5:20:53 PM	Bubbler valve closed
2/3/2011	5:20:53 PM	Bubbler valve opened
2/3/2011	5:20:54 PM	Bubbler valve closed
2/3/2011	5:21:13 PM	Bubbler valve opened
2/3/2011	5:21:14 PM	Bubbler valve closed
2/3/2011	5:21:15 PM	Bubbler valve opened
2/3/2011	5:21:16 PM	Bubbler valve closed
2/3/2011	5:21:16 PM	Bubbler valve opened
2/3/2011	5:21:17 PM	Bubbler valve closed
2/3/2011	5:21:19 PM	Tube furnace set to 0
2/3/2011	5:21:22 PM	Bubbler valve opened
2/3/2011	5:21:26 PM	Bubbler valve closed
2/3/2011	5:21:27 PM	Bubbler valve opened
2/3/2011	5:21:36 PM	Bubbler valve closed
2/3/2011	5:21:40 PM	H2 valve opened
2/3/2011	5:21:41 PM	Bubbler valve opened
2/3/2011	5:21:44 PM	H2 valve closed
2/3/2011	5:21:47 PM	H2 valve opened
2/3/2011	5:22:10 PM	Bubbler valve closed
2/3/2011	5:22:13 PM	Bubbler valve opened
2/3/2011	5:22:21 PM	Bubbler valve closed
2/3/2011	5:22:25 PM	Bubbler valve opened
2/3/2011	5:22:38 PM	Tube furnace set to 1000
2/3/2011	5:23:46 PM	Bubbler valve closed
2/3/2011	5:23:51 PM	Bubbler valve opened
2/3/2011	5:29:36 PM	SiCl4 MFC set to  50.000000
2/3/2011	5:31:34 PM	SiCl4 pre valve opened
2/3/2011	5:31:35 PM	SiCl4 post valve opened
2/3/2011	5:31:36 PM	SiCl4 post valve closed
2/3/2011	5:31:36 PM	SiCl4 post valve opened
2/3/2011	7:16:23 PM	Recipe started at 7:16 PM
2/3/2011	7:16:23 PM	Helium valve closed
2/3/2011	7:16:23 PM	BCl3 valve closed
2/3/2011	7:16:23 PM	PH3 valve closed
2/3/2011	7:16:23 PM	Main Vac valve closed
2/3/2011	7:16:23 PM	Bypass valve closed
2/3/2011	7:16:23 PM	H2 valve opened
2/3/2011	7:16:23 PM	SiCl4 pre valve opened
2/3/2011	7:16:23 PM	SiCl4 post valve opened
2/3/2011	7:16:23 PM	Bubbler valve opened
2/3/2011	7:16:23 PM	Helium MFC set to  0.000000
2/3/2011	7:16:23 PM	H2 MFC set to  500.000000
2/3/2011	7:16:23 PM	BCl3 MFC set to  0.000000
2/3/2011	7:16:23 PM	PHl3 MFC set to  0.000000
2/3/2011	7:16:23 PM	SiCl4 MFC set to  50.000000
2/3/2011	7:16:23 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	7:16:23 PM	Tube furnace set to 1000
2/3/2011	8:39:43 PM	H2 valve closed
2/3/2011	8:39:43 PM	BCl3 valve closed
2/3/2011	8:39:43 PM	PH3 valve closed
2/3/2011	8:39:43 PM	SiCl4 pre valve closed
2/3/2011	8:39:43 PM	SiCl4 post valve closed
2/3/2011	8:39:43 PM	Main Vac valve closed
2/3/2011	8:39:43 PM	Bypass valve closed
2/3/2011	8:39:43 PM	Helium valve opened
2/3/2011	8:39:43 PM	Bubbler valve opened
2/3/2011	8:39:43 PM	Helium MFC set to  500.000000
2/3/2011	8:39:43 PM	H2 MFC set to  0.000000
2/3/2011	8:39:43 PM	BCl3 MFC set to  0.000000
2/3/2011	8:39:43 PM	PHl3 MFC set to  0.000000
2/3/2011	8:39:43 PM	SiCl4 MFC set to  0.000000
2/3/2011	8:39:43 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	8:39:43 PM	Tube furnace set to 0
2/3/2011	8:49:43 PM	Helium valve closed
2/3/2011	8:49:43 PM	H2 valve closed
2/3/2011	8:49:43 PM	BCl3 valve closed
2/3/2011	8:49:43 PM	PH3 valve closed
2/3/2011	8:49:43 PM	SiCl4 pre valve closed
2/3/2011	8:49:43 PM	SiCl4 post valve closed
2/3/2011	8:49:43 PM	Main Vac valve closed
2/3/2011	8:49:43 PM	Bypass valve closed
2/3/2011	8:49:43 PM	Bubbler valve closed
2/3/2011	8:49:43 PM	Helium MFC set to  0.000000
2/3/2011	8:49:43 PM	H2 MFC set to  0.000000
2/3/2011	8:49:43 PM	BCl3 MFC set to  0.000000
2/3/2011	8:49:43 PM	PHl3 MFC set to  0.000000
2/3/2011	8:49:44 PM	SiCl4 MFC set to  0.000000
2/3/2011	8:49:44 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	8:49:44 PM	Tube furnace set to 0
2/3/2011	8:49:44 PM	Run finished at 8:49 PM
2/3/2011	9:41:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/3/2011	9:41:21 PM	Recipe started at 9:41 PM
2/3/2011	9:41:21 PM	Helium valve closed
2/3/2011	9:41:21 PM	H2 valve closed
2/3/2011	9:41:21 PM	BCl3 valve closed
2/3/2011	9:41:21 PM	PH3 valve closed
2/3/2011	9:41:21 PM	SiCl4 pre valve closed
2/3/2011	9:41:21 PM	SiCl4 post valve closed
2/3/2011	9:41:21 PM	Main Vac valve closed
2/3/2011	9:41:21 PM	Bubbler valve closed
2/3/2011	9:41:21 PM	Bypass valve opened
2/3/2011	9:41:21 PM	Helium MFC set to  0.000000
2/3/2011	9:41:21 PM	H2 MFC set to  0.000000
2/3/2011	9:41:21 PM	BCl3 MFC set to  0.000000
2/3/2011	9:41:21 PM	PHl3 MFC set to  0.000000
2/3/2011	9:41:21 PM	SiCl4 MFC set to  0.000000
2/3/2011	9:41:21 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	9:41:21 PM	Tube furnace set to 0
2/3/2011	9:41:29 PM	Helium valve closed
2/3/2011	9:41:29 PM	H2 valve closed
2/3/2011	9:41:29 PM	BCl3 valve closed
2/3/2011	9:41:29 PM	PH3 valve closed
2/3/2011	9:41:29 PM	SiCl4 pre valve closed
2/3/2011	9:41:29 PM	SiCl4 post valve closed
2/3/2011	9:41:29 PM	Bubbler valve closed
2/3/2011	9:41:29 PM	Main Vac valve opened
2/3/2011	9:41:29 PM	Bypass valve opened
2/3/2011	9:41:29 PM	Helium MFC set to  0.000000
2/3/2011	9:41:29 PM	H2 MFC set to  0.000000
2/3/2011	9:41:29 PM	BCl3 MFC set to  0.000000
2/3/2011	9:41:30 PM	PHl3 MFC set to  0.000000
2/3/2011	9:41:30 PM	SiCl4 MFC set to  0.000000
2/3/2011	9:41:30 PM	Bypass solenoid MFC set to  0.000000
2/3/2011	9:41:30 PM	Tube furnace set to 0
2/3/2011	9:41:30 PM	Run finished at 9:41 PM
2/3/2011	9:41:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/3/2011	9:41:38 PM	Bypass valve closed
2/3/2011	9:41:38 PM	Main Vac valve closed
2/3/2011	9:41:41 PM	Bypass valve opened
2/3/2011	9:41:42 PM	Main Vac valve opened
2/3/2011	9:41:55 PM	Bypass valve closed
2/3/2011	9:41:56 PM	Main Vac valve closed
2/3/2011	9:41:56 PM	Bypass valve opened
2/3/2011	9:41:57 PM	Main Vac valve opened
2/3/2011	9:41:57 PM	Bypass valve closed
2/3/2011	9:41:58 PM	Bypass valve opened
2/3/2011	9:42:03 PM	Bypass valve closed
2/3/2011	9:42:04 PM	Main Vac valve closed
2/3/2011	9:42:04 PM	Main Vac valve opened
2/3/2011	9:42:05 PM	Bypass valve opened
